DuPont Krytox 1514 Vacuum Pump Fluid, 1 kg/2.2lb
DuPont Krytox vacuum pump fluid is a synthetic perfluoropolyether (PFPE) mechanical vacuum pump fluid that is the product of choice where complete non-flammability, oxygen compatibility and resistance to aggressive chemicals are requirements. Krytox 1506 VPF oil has a Vapor Pressure of 4 x 10-7 Torr @ 20 Degrees Celsius. (Krytox 1514 VPF oil = 2×10-7 Torr, Krytox 1525 VPF Oil = 1×10-7 Torr). With its ultra-low vapor pressures and its ability to be reclaimed, Krytox VPF Oils are an excellent choice for plasma, CVD and other semiconductor operations. These synthetic lubricants provide superior performance and extended life as lubricants and sealants in: vacuum pumps where safety is critical, in hostile environments where semiconductor process chemicals can attack most other lubricants, and in vacuum system valves, seals, bearings, and connectors where low vapor pressure, outgassing, and contamination are intolerable.
Kryton Vacuum Pump Fluid Data Sheet